Shape Effect on the Reflectance of Sub-Wavelength Structures on Silicon Nitride for Solar Cell Application
نویسندگان
چکیده
We stdy the spectral reflectivity of conical-, cylindricaland parabolic-shaped silicon nitride (Si3N4) sub-wavelength structures (SWS). A multilayer rigorous coupled-wave approach is adopted to estimate the reflection properties of Si3N4 SWS. Optimal shapes of SWS in terms of effective reflectance are analyzed over a range of wavelength. The results of our study show that a 3.15% effective reflectivity could be achieved for the optimized conical-shaped SWS with the height of 160 nm and the non-etched Si3N4 layer thickness of 70 nm among different shape structure.
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